8' Al 加热盘
| Treatment | Bare/ALF coating |
| Material | Aluminum |
| Process Temp | ~470℃ |
| Uniformity | <1% |
| Treatment | Bead blast/Anodizing |
| Material | Aluminum |
| Process Temp | ~470℃ |
| Uniformity | <1% |
| Treatment | Bare |
| Material | Aluminum |
| Process Temp | ~470℃ |
| Uniformity | <1% |
